IFAC SYSID2000, California, USA (2000.6)

System identification and physical parameter estimation of anti-vibration units
in semiconductor exposure apparatus

S.Adachi, H.Takanashi, H.Kato, T.Mayama and S.Wakui

Abstract

In this paper, system identification and physical parameter estimation of semiconductor exposure apparatus for active vibration control are discussed. Since the semiconductor exposure apparatus has multi-degrees-of-freedom (multi-DOF) motional mechanism, the apparatus must be treated as a Multi-Input-Multi-Output (MIMO) system. In this paper, the subspace based state-space system identification (4SID)
method is applied, because it can be extended to MIMO systems easily. The effectiveness of the 4SID method to MIMO system identification is examined through experimental data. An estimation method of physical parameters of the semiconductor exposure apparatus
based on the identified models is also presented.Furthermore, a system identification device is described which is developed for modeling of the semiconductor exposure apparatus. It measures input and output data for identification and executes system identification algorithms based on MATLAB commands.

Key words: modeling, system identification, semiconductor exposure apparatus, multi-DOF system, physical parameter estimation, system identification device.