Trans. of ISCIE, Vol.14, No.7, pp.339-346 (2001.7)

Multivariable system identification experiments for semiconductor exposure apparatus supported by anti-vibration units using subspace method

H.Takanashi, H.Kato, A.Toukairin, T.Mayama, S.Wakui and S.Adachi

Abstract

In this paper, multi-degrees-of-freedom (multi-DOF) system identification of semiconductor exposure apparatus supported by anti-vibration units is discussed. to meet nanometer order semiconductor lithography demands for alignment accuracy, vibration contorl is one of the importmant technologies in the semiconductor exposure apparatus suppored by anti-vibration units. A dynamical model of the plant is necessary in order to design the microvibration contoroller and to evaluate the performance of the control systems. The controlled object is essentially a multivariable system, bacause the plant has 6-DoF dynamical model is identified from the exciteing signals and the vibration output signals. The model is ractically constructed in a short time using subspace method in system identification theory. Identification results are evaluated through exprimental data in comparison with a conventional frequency response method.